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Apparature
  • High-resolution X-ray diffractometer X'Pert Pro MRD XL Ext. Double-crystal and triple-crystal diffraction schemes, glancing-incidence diffraction and reflectometry. Analysis of thin layers, quantum dots size and shape, lateral strain, chemical composition. (Holland)
  • X'Pert MRD Applications
    X'Pert Epitaxy has been developed for materials scientists analyzing problems using x-ray diffraction measurements. X'Pert Epitaxy is used to analyze data recorded using X'Pert PRO Diffractometers to determine the crystal quality of deposited layers. The thin layers may range from near perfect single crystals (for example: III-V semiconductor laser structures) to textured polycrystalline (for example: magnetic oxide layers).
    The functionality includes:
    -calculating the mismatch, composition, thickness and relaxation of layers from rocking curves and maps
    -analysis of regular arrays of rocking curves recorded from a wafer
    -simulation and automatic fitting of rocking curves for semiconductors
    The materials which can be analyzed using X'Pert Epitaxy include
    III-V compound semiconductors: GaAs, AIGaAs, InP, InGaAs, InSb and so on
    II-VI compound semiconductors: CdTe, HgCdTe, ZnSe, ZnTe
    gallium nitride based device structures
    silicon, silicon germanium alloys
    epitaxial high Tc superconductors
    epitaxial metallic layers and multilayers
    highly oriented polycrystalline layers: PtSi on Si and so on
    ferroelectric non-volatile RAM structures
    X'Pert Epitaxy can extract information on structural parameters such as:
    lattice mismatch between layer and substrate
    alloy composition of layer
    layer thickness
    superlattice period
    substrate curvature
    mosaic spread
    layer relaxation
    For information about data collecting procedures see:
    The Diffractometer Axes
    The Reciprocal Space Interface
    Scaling in Reciprocal Space
    Single Scan Directions in Reciprocal Space
    Area scans
    Diffractometer Resolution
    The Reciprocal Lattice of Real Samples
    Recording a Rocking Curve
  • Double-crystal diffractometer DRON-3 with copper radiation. Applied in standard coplanar diffraction cheme for investigation of A3B5 compounds. (Russia)
  • Triple-crystal diffractometer TRS-001 with superposed optical axes. Applied in standard coplanar diffraction scheme for analysis of thin layers, lateral strain, chemical composition. (Russia)
  • Double-crystal diffractometer DRON-3 with copper radiation. Applied in standard coplanar diffraction scheme for investigation of Si, Ge compounds. (Russia)
  • Powder diffractometer DRON-3M with copper radiation. Applied in standard coplanar diffraction scheme for investigation polycristalline and amorphous compounds, phase analysis. (Russia)
  • Single-crystal X-ray diffractometer DRON-3M with copper anode. Applied in standard coplanar diffraction scheme for investigation of energetic dependencies near K-absorption edge. (Russia)
 
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